Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

Basic Specifications

Model NO. CY-MSP300S-3RF Coating Type Vacuum Coating
Substrate Steel Certification CE
Sample Stage Dia. 185mm Heating Temp. Max 500℃
Rotate Speed 1-20rpm Adjustable Chamber Material Stainless Steel
Production Capacity 100 pieces/Month Package Wooden Case

Vacuum Plating Magnetron Sputtering System

The Three targets RF magnetron sputtering coater is a cost-effective coating equipment designed for standardized, modular, and customizable performance. It features 1-inch or 2-inch magnetron targets, allowing users to select the appropriate target based on substrate size.

RF Power Supply: Equipped with three 300W RF power supplies, ideal for non-metal preparation and multi-layer coating requirements.
Precision Gas Control: Features a two-channel high-precision mass flowmeter (expandable to four channels) for complex gas environment construction.
High Vacuum Performance: Advanced turbomolecular pump sets achieve an ultimate vacuum of up to 1.0E-5Pa.
Efficient Operation: Solenoid valve control allows chamber access without shutting down the pump, significantly increasing workflow efficiency.

Technical Parameters

Sample Stage Magnetron Sputtering Head
Size φ185mm Quantity 2" × 3 (1", 2" optional)
Temp Accuracy ±1ºC Cooling Mode Water cooling (10L/min)
Vacuum Chamber Vacuum System
Chamber Size φ300mm × 300mm Ultimate Vacuum 1.0E-5Pa
Material Stainless steel Pumping Rate 600L/S (Molecular pump)

Applications

This versatile device is suitable for preparing:

  • Ferroelectric thin films
  • Conductive & Alloy films
  • Semiconductor & Ceramic films
  • Dielectric & Optical films
  • Oxide & Hard films
  • PTFE thin films

Detailed Photos

Frequently Asked Questions

Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high-quality products and optimal pricing through mature technical experience.
What is your after-sales service system?
We provide a 12-month warranty period and lifetime maintenance. Our professional pre-sales and after-sales departments respond within 24 hours to resolve any technical issues.
How long is the delivery time for standard and customized instruments?
For goods in stock, delivery takes 5-10 days. For customized instruments tailored to specific requirements, it typically takes 30-60 days depending on the specifications.
How do you handle different power supply and plug standards?
We can supply transformers and plugs specifically matched to your local requirements and national power standards.
What are the available payment and delivery methods?
We accept T/T, L/C, and D/P. Goods are packed in standard export fumigated wooden boxes and can be delivered via express, air, or sea shipping.

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