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| Customization: | Available |
|---|---|
| Warranty: | One Year |
| Type: | Coating Production Line |
| Model NO. | CY-MSP300S-3RF | Coating Type | Vacuum Coating |
| Substrate | Steel | Certification | CE |
| Sample Stage | Dia. 185mm | Heating Temp. | Max 500℃ |
| Rotate Speed | 1-20rpm Adjustable | Chamber Material | Stainless Steel |
| Production Capacity | 100 pieces/Month | Package | Wooden Case |
The Three targets RF magnetron sputtering coater is a cost-effective coating equipment designed for standardized, modular, and customizable performance. It features 1-inch or 2-inch magnetron targets, allowing users to select the appropriate target based on substrate size.
| Sample Stage | Magnetron Sputtering Head | ||
|---|---|---|---|
| Size | φ185mm | Quantity | 2" × 3 (1", 2" optional) |
| Temp Accuracy | ±1ºC | Cooling Mode | Water cooling (10L/min) |
| Vacuum Chamber | Vacuum System | ||
| Chamber Size | φ300mm × 300mm | Ultimate Vacuum | 1.0E-5Pa |
| Material | Stainless steel | Pumping Rate | 600L/S (Molecular pump) |
This versatile device is suitable for preparing:






Wigivida Medical